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전자 빔 시스템 본문
| 제품코드 | G059602 | |
|---|---|---|
| 판매 회사명 | (주)아이브이티 | |
| 연락처 | 053-354-2939 | |
| 홈페이지 | - | |
| 제품홍보관 | http://blog.yeogie.com/ivt4u |
Electro-Plated Stainless Steel chamber(D-Shaped Box)
4"Diameter View Port on Front Door With Manual Shutter
Single/Multi Pocket E-Beam source with Water Cooled Crucible(4cc up to 75cc) with individual shutter
High Voltage Power Supply(3kw to 15kw)
X-Y Beam Sweep & Controller
TMP, Cryo Vacuum pumping System with Matching Dry pump or Dual Stage Rotary Vane Pump
Quartz Crystal Thickness Sensor with Deposition Controller
Full Range Vacuum Gauge with Digital Display & Readout
Substrate Stage Rotation & Heating(100℃ up to 400℃)
PC or PLC Controlled System
4"Diameter View Port on Front Door With Manual Shutter
Single/Multi Pocket E-Beam source with Water Cooled Crucible(4cc up to 75cc) with individual shutter
High Voltage Power Supply(3kw to 15kw)
X-Y Beam Sweep & Controller
TMP, Cryo Vacuum pumping System with Matching Dry pump or Dual Stage Rotary Vane Pump
Quartz Crystal Thickness Sensor with Deposition Controller
Full Range Vacuum Gauge with Digital Display & Readout
Substrate Stage Rotation & Heating(100℃ up to 400℃)
PC or PLC Controlled System
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