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솔라셀제조용 Frunace 본문
| 제품코드 | G046052 | |
|---|---|---|
| 판매 회사명 | (주)피앤테크 | |
| 연락처 | 043-211-3917 | |
| 홈페이지 | - | |
| 제품홍보관 | http://blog.yeogie.com/p-tech2000 |
| PF-S85 Furnace System |
| Solar Cell Process Application - POCl3 - BBr3 - N2/H2 Annealing - Oxidation - Activation |
PF-S85 Series System Features
- Wafer size : 125mm * 125mm, 156mm * 156mm
- Load Capacity : 2000 wafers ( 1 Bank 5 Tube), 400 Wafers / 1 Tube
- Auto Pressure Control / Softland & Auto Door
- Thermal uniformity accuracy :
* Between 400℃ and 800℃ ±1℃ / Between 800℃ and 1150℃ ±0.5℃
- Ramp rate : 0.1~ 20℃ per minute, both ramp up and ramp down
- Operating temperature range : 400℃ ~ 1150℃
- Boat Speed Control : 3~125 cm / minute
- 3~6 Zone by Spikes and Profile T/C
* Between 400℃ and 800℃ ±1℃ / Between 800℃ and 1150℃ ±0.5℃
- Ramp rate : 0.1~ 20℃ per minute, both ramp up and ramp down
- Operating temperature range : 400℃ ~ 1150℃
- Boat Speed Control : 3~125 cm / minute
- 3~6 Zone by Spikes and Profile T/C
- Automation Application : Boat Loader, Elevator
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